Keramická trubice z nitridu křemíku

Konstrukční prvky
1. Material science-level formula optimization
High-purity Si₃N₄ substrate: purity ≥99.5%, using Y₂O₃-Al₂O₃ composite sintering aid, controllable distribution of grain boundary phase, avoiding high-temperature grain boundary softening.

Gradient structure design: The inner and outer layers of the tube body adopt differentiated density (such as high-density outer layer for corrosion resistance, and porous inner layer for lubricant storage), extending the service life by 30%.

2. Design for extreme environmental adaptability
Thermal shock resistant architecture:

Micro crack deflection technology (through directional arrangement of β-Si₃N₃ whiskers) keeps the structure intact when ΔT≥800℃.

Pre-set metallized transition layer (Mo-Mn method) at the pipe end to match the thermal expansion coefficient of the metal flange to eliminate the risk of cracking.

Corrosion resistance and strengthening:

Surface laser remelting treatment to form a nanocrystalline SiO₂ passivation film, resistant to pH1-13 acid and alkali corrosion (except HF).

3. Precision engineering structure
Extra tolerance control:

Inner diameter tolerance ±0.005mm (air bearing level), roundness ≤0.003mm, suitable for semiconductor wafer transmission.

Inner wall mirror polishing (Ra≤0.05μm) reduces fluid resistance and avoids particle deposition.

Special-shaped integrated design:

Supports embedded cooling channels, porous permeable structures (such as fuel cell bipolar plate gas path), and thread/flange integrated molding.