Introduction to aluminum nitride ceramic materials
Aluminum nitride is a high-performance ceramic material with excellent electrical insulation and high thermal conductivity, making it particularly suitable for applications requiring effective heat dissipation. Its coefficient of thermal expansion is close to that of silicon, making it an ideal material for semiconductor processing equipment components. Furthermore, aluminum nitride possesses excellent plasma resistance and high mechanical strength, and is widely used in high-tech fields such as optoelectronics and equipment components in high-temperature environments.
Features
Aluminum nitride (AlN) is an advanced ceramic material that is crucial in high-tech fields due to its excellent thermal conductivity and electrical insulation. Aluminum nitride also possesses high mechanical strength and stable chemical properties, making it ideal for electronic and industrial applications.
1. Excellent thermal conductivity and electrical insulation
Aluminum nitride combines very high thermal conductivity with good electrical insulation, making it highly valuable in applications that require efficient heat dissipation while demanding electrical isolation.
High-efficiency heat dissipation solutions: Aluminum nitride’s high thermal conductivity makes it an ideal heat dissipation material for high-performance electronic devices, such as power semiconductors, high-density integrated circuits, and high-frequency electronic components. These applications typically require materials that can quickly and efficiently dissipate heat to prevent performance degradation or damage due to overheating.
Electrical applications: While maintaining high thermal conductivity, aluminum nitride also possesses excellent electrical insulation properties. This is particularly important for insulating components in applications such as power conversion equipment and high-voltage electrical systems, where materials need to effectively conduct heat without being conductive.
2. A thermal expansion coefficient matching silicon and excellent plasma resistance.
Aluminum nitride has a coefficient of thermal expansion very close to that of silicon, a property that, along with its plasma resistance, makes it particularly important in semiconductor manufacturing.
Semiconductor Manufacturing: Because aluminum nitride’s coefficient of thermal expansion matches that of silicon, it minimizes thermal stress caused by temperature variations when used as a substrate or thermal interface material in semiconductor devices. This is crucial for improving the reliability and performance of semiconductor devices.
Plasma Resistance: During semiconductor processing, components often need to withstand harsh plasma environments, which can corrode or damage weaker materials. Aluminum nitride’s excellent plasma resistance allows it to maintain performance and structural stability under these conditions.
These properties of aluminum nitride make it particularly important in modern high-tech fields, especially in the manufacturing of high-performance electronic devices and semiconductors. Its excellent physical properties not only enhance equipment performance but also extend product lifespan, thus providing a reliable material solution for a variety of demanding industrial applications.
| Primary characteristics | ||
| Type | Unit | Aluminum Nitride |
| Materiale | \ | ALN |
| Colour | \ | Gray |
| Density | g/cm3 | 3.3 |
| Mechanical properties | ||
| Type | Unit | Aluminum Nitride |
| Flexural Strength(20℃) | Mpa | 470 |
| Compressive Strength(20℃) | Mpa | 2100 |
| Modulus of Elastic(young)(20℃) | Gpa | 320 |
| Tracture Toughness(20℃) | MPam½ | 2.6 |
| Poi sion’s Ratio(20℃) | \ | 0.24 |
| Hardness HRA(20℃) | HRA | 87 |
| Vickers Hardness(HV1) | Gpa(kg/mm2) | 1122 |
| Rockwell Hardness(45N) | R45N | 78.5 |
| Thermal properties | ||
| Type | Unit | Aluminum Nitride |
| Thermal Expansion Coefficient | 10-6K-1 | 4.6 |
| Thermal Conductivity(20℃) | W/mk | 170 |
| Thermal Shock Resistance | △T.℃ | 400 |
| Specific Heat Capacity | J/g·k | 0.72 |
| Max working Temperature(In Oxidizing) | ℃ | 1000 |
| Electrical properties | ||
| Type | Unit | Aluminum Nitride |
| Vol une Resistivity at 20℃ | Ωcm | 2.75*1014 |
| Dielectric Strength | KV/mm | 17 |
| Dielectric Constant | \ | 8.38 |
| Dielectric LossAngle at 20℃,1MHz20℃ | tanδ | 3*10-3 |